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You searched IISERK - Subject: Rashtrapati Bhavan (New Delhi, India)
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Call Number
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621.3815/2
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Author
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International Conference on Rapid Thermal Processing for Future Semiconductor Devices 2001 : Ise-Shima, Mie, Japan)
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Title
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Rapid thermal processing for future semiconductor devices [electronic resource] : proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001 / edited by Hisashi Fukuda.
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Publication
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Amsterdam : London : Elsevier, 2003.
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Material Info.
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x, 150 p. : ill. ; 24 cm.
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Summary Note
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This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices. This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
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Notes
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Electronic reproduction. Amsterdam : Elsevier Science & Technology, 2007.
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ISBN
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9780444513397
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ISBN
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0444513396
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Subject
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Semiconductors Heat treatment Congresses.
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Subject
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Rapid thermal processing Congresses.
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Subject
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Electronic books.
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Added Entry
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Fukuda, Hisashi.
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Added Entry
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ScienceDirect (Online service)
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Date
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Year, Month, Day:01405141
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Link
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An electronic book accessible through the World Wide Web; click for information ScienceDirect
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Link
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Publisher description
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